Deposition of Thin SiO x Films by Direct Precursor Injection in Atmospheric Pressure Microwave Torch (TIA)-Reference-Cited by-同舟云学术

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Deposition of Thin SiO x Films by Direct Precursor Injection in Atmospheric Pressure Microwave Torch (TIA)

Published:2009-05-26 Issue:S1 Volume:6 Page:S508-S513
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Processes Polym.

Author:

Asad Syed Salman,Lavoute Jean Pierre,Dublanche-Tixier Christelle,Jaoul Cédric,Chazelas Christophe,Tristant Pascal,Boisse-Laporte Caroline

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.200931104/fullpdf

Reference23 articles.

1. Plasma-polymerized coatings of trimethylsilane deposited on cold-rolled steel substrates Part 2. Effect of deposition conditions on corrosion performance

2. Microwave atmospheric pressure plasma for surface treatment and reactive coating on steel surfaces

3. Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD

4. Mechanical durability of ultra-water-repellent thin film by microwave plasma-enhanced CVD

5. Investigation of deposition temperature effect on properties of PECVD SiOCH low-k films

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1. Area selective atmospheric pressure PECVD of organosilicon precursors: Role of vinyl and ethoxy groups on silicon oxycarbide deposition patterns - A case study;Surface and Coatings Technology;2022-12

2. Aerosol assisted atmospheric pressure plasma jet for a high deposition rate of silica-like thin films;The European Physical Journal Applied Physics;2022

3. Deposition of anti‐fog coatings on glass substrates using the jet of an open‐to‐air microwave argon plasma at atmospheric pressure;Plasma Processes and Polymers;2020-04-22

4. Dynamic mode optimization for the deposition of homogeneous TiO2 thin film by atmospheric pressure PECVD using a microwave plasma torch;Applied Surface Science;2019-11

5. Low-temperature deposition of TiO2by atmospheric pressure PECVD towards photoanode elaboration for perovskite and solid-state dye-sensitized solar cells;EPJ Photovoltaics;2019

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