Production of High-Density Capacitively Coupled Plasma with RF Multi-Hollow Cathode and/or High Secondary Electron Emission for DLC Film Preparation
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.200931001/fullpdf
Reference11 articles.
1. Diamond-like amorphous carbon
2. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
3. Sputter deposition of dense diamond‐like carbon films at low temperature
4. Tetrahedral bonding in amorphous carbon
5. Recent advances in plasma source ion implantation at Los Alamos National Laboratory
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