Mechanical Study of High Resistance Silicon Carbide Based Multi-Nano-Layers Grown by Multifrequency PACVD-Reference-Cited by-同舟云学术

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Mechanical Study of High Resistance Silicon Carbide Based Multi-Nano-Layers Grown by Multifrequency PACVD

Published:2009-06 Issue:S1 Volume:6 Page:S917-S922
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Processes Polym.

Author:

Rebib Farida,Gaudy Thomas,Soum-Glaude Audrey,Caron Isabelle,Da Silva Tony,Picard Christine,Cournut Fabienne,Thomas Laurent

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.200932305/fullpdf

Reference19 articles.

1. Vacuum surface treatments

2. A comparative study of state-of-the-art diamond-like carbon films

3. G. Van der Kolk Opening Lecture of Conference PSE2006 2006

4. Thermal properties of DLC thin films bombarded with ion beams

5. Recent progress on the tribology of doped diamond-like and carbon alloy coatings: a review

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1. Development of electrodeposited multilayer coatings: A review of fabrication, microstructure, properties and applications;Applied Surface Science Advances;2021-12

2. Enhanced nano-mechanical and wear properties of polycarbosilane derived SiC coating on silicon;Applied Surface Science;2015-01

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