1. Devices Group, Medical Systems Institute for Laser Technologies in Medicine & Metrology (ILM) at Ulm University Ulm Germany
2. Biology Group, Medical Systems Institute for Laser Technologies in Medicine & Metrology (ILM) at Ulm University Ulm Germany
3. IMTEK ‐ Department of Microsystems Engineering University of Freiburg, Georges‐Koehler‐Allee 103 Freiburg Germany
4. Coherent Laser Systems GmbH, Estlandring 6 Lübeck Germany
5. Genome Identification Diagnostics GmbH (GenID) Straßberg Germany