Line-Profile resist development simulation techniques
Author:
Publisher
Wiley
Subject
Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry
Reference2 articles.
1. and ?Modeling Projection Printing of Photoresists,? IEEE Trans. on Electron Devices, vol. ED-22, pp. 456-464 (July 1975).
2. and Private communication, Jan. 1972.
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