Fabrication of doped nano-electromechanical systems-Reference-Cited by-同舟云学术

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Fabrication of doped nano-electromechanical systems

Published:2007-08-30 Issue:5 Volume:1 Page:205-207
ISSN:1862-6254
Container-title:physica status solidi (RRL) - Rapid Research Letters
language:en
Short-container-title:phys. stat. sol. (RRL)

Author:

Scheible Dominik V.,Qin Hua,Kim Hyun-Seok,Blick Robert H.

Funder

DARPA through the NEMS-CMOS program

Wisconsin Alumni Research Foundation

National Science Foundation

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssr.200701186/fullpdf

Reference13 articles.

1. A. N. Cleland Foundation of Nanomechanics (Springer, Heidelberg, 2002).

2. Quantum electromechanical systems

3. Putting Mechanics into Quantum Mechanics

4. Condensation of bombarding gallium ions on a silicon surface

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3. Optical interferometric displacement calibration and thermomechanical noise detection in bulk focused ion beam-fabricated nanoelectromechanical systems;Journal of Micromechanics and Microengineering;2010-10-29

4. Bulk focused ion beam fabrication with three-dimensional shape control of nanoelectromechanical systems;Journal of Micromechanics and Microengineering;2010-09-01

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