Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW-substrate materials (LiNbO3and LiTaO3) using AR-XPS-Reference-Cited by-同舟云学术

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Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW-substrate materials (LiNbO3and LiTaO3) using AR-XPS

Published:2016-03-30 Issue:7 Volume:48 Page:570-574
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Vogel U.¹²,Gemming T.¹,Eckert J.¹²,Oswald S.¹

Affiliation:

1. IFW Dresden, SAWLab Saxony; PO Box 270116 D-01171 Dresden Germany

2. Institute of Materials Science; TU Dresden; D-01069 Dresden Germany

Funder

Deutsche Forschungsgemeinschaft

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference25 articles.

1. Applicability of LiNbO/sub 3/, langasite and GaPO/sub 4/ in high temperature SAW sensors operating at radio frequencies

2. M. Spindler Technische Universität Dresden 2012

3. SAW-grade SiO 2 for advanced microfluidic devices

4. Surface acoustic wave atomizer

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1. Enhanced surface blistering efficiency of H+ implanted lithium tantalate by chemical reduction modification;Applied Surface Science;2023-06

2. Improvement of textured AlCu with Ta underlayer on LiNbO₃ substrate;AIP Advances;2022-10-01

3. Formation of Corrosion Resistant Hard Coating of Litao3 by Anodizing in Molten Lino3;Innovations in Corrosion and Materials Science (Formerly Recent Patents on Corrosion Science);2019-09-24

4. Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate;Applied Surface Science;2017-12

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