Self‐Aligned Photonic Defect Microcavity Lasers with Site‐Controlled Quantum Dots

Abstract

AbstractSelf‐assembled semiconductor quantum dots face challenges in terms of scalable device integration because of their random growth positions, originating from the Stranski–Krastanov growth mode. Even with existing site‐controlled growth techniques, for example, nanohole or buried stressor concepts, a further lithography and etching step with high spatial alignment requirements is necessary to accurately integrate quantum dots into the nanophotonic devices. Here, the fabrication and characterization of strain‐induced site‐controlled microcavities are reported, where site‐controlled quantum dots are positioned at the antinode of the optical mode field in a self‐aligned manner without the need of any further nano‐processing. It is shown that the cavity properties such as Q‐factor, mode volume, and mode splitting can be tailored by the geometry of the integrated buried stressor, with an opening <4 µm. The experimental results are complemented with theory calculations based on continuum elasticity. Lasing signatures, including super‐linear input‐output response and linewidth narrowing, are observed for a 3.6‐µm self‐aligned cavity with a Q‐factor of 18 000. Furthermore, the quasi‐planar site‐controlled cavities exhibit no detrimental thermal effects. This approach integrates seamlessly with the industrial‐matured manufacturing process and the buried‐stressor technique, paving the way for exceptional scalability and straightforward manufacturing of high‐β microlasers and bright quantum light sources.