1. State Key Lab of Advanced Optical Communication Systems and Networks Department of Electronic Engineering Shanghai Jiao Tong University Shanghai 200240 China
2. National Key Laboratory of Science and Technology on Micro/Nano Fabrication Shanghai Jiao Tong University Shanghai 200240 China
3. Department of Micro/Nano Electronics Shanghai Jiao Tong University Shanghai 200240 China
4. Center for Advanced Electronic Materials and Devices Shanghai Jiao Tong University Shanghai 200240 China
5. Key Laboratory of Light Field Manipulation and Information Acquisition Ministry of Industry and Information Technology and Shaanxi Key Laboratory of Optical Information Technology School of Physical Science and Technology Northwestern Polytechnical University Xi'an 710129 China