Effects of elastic scattering and analyzer-acceptance angle on the analysis of angle-resolved X-ray photoelectron spectroscopy data
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference28 articles.
1. An ARXPS primer
2. Report on the 47th IUVSTA Workshop ‘Angle-Resolved XPS: the current status and future prospects for angle-resolved XPS of nano and subnano films’
3. Angle-resolved XPS and AES: Depth-resolution limits and a general comparison of properties of depth-profile reconstruction methods
4. XPS and angle resolved XPS, in the semiconductor industry: Characterization and metrology control of ultra-thin films
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