The study on the nanomachining property and cutting model of single-crystal sapphire by atomic force microscopy
Author:
Affiliation:
1. Department of Mechanical Engineering; Tungnan University; ShenKeng New Taipei City Taiwan
2. Department of Mechanical and Energy Engineering; National Chiayi University; Chiayi City Taiwan
Funder
NSC
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.21160/fullpdf
Reference13 articles.
1. Ductile-regime machining model for diamond turning of brittle materials;Blackley;Precision Eng,1991
2. Ductile-regime machining of germanium and silicon;Blake;J Am Ceram Soc,1990
3. Optimum machining of optical crystals;Chol;Mech Eng,2003
4. High nitrogen pressure growth of GaN crystals and their applications for epitaxy of GaN based structure;Gregory;Mater Sci Eng B,2001
5. Fabricating nanostructures through a combination of nano-oxidation and wet etching on the different surface conditions of silicon wafer;Huang;Scanning,2012
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Selective Nanoscale Fabrication with Roughness Reduction of Polycrystalline Silicon by Physically Induced Fluorine Bonds Using Atomic Force Microscope;Advanced Engineering Materials;2023-06-15
2. A review of simulation and experiment research on cutting mechanism and cutting force in nanocutting process;The International Journal of Advanced Manufacturing Technology;2022-06-16
3. Anisotropic brittle-ductile transition of monocrystalline sapphire during orthogonal cutting and nanoindentation experiments;Nanotechnology and Precision Engineering;2018-09
4. A molecular dynamics study on atomistic mechanisms of nano-scale cutting process of sapphire;Journal of Mechanical Science and Technology;2017-09
5. Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology;Materials;2015-12-04
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3