Pin point depth profiling for unit device or several nano-devices-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Pin point depth profiling for unit device or several nano-devices

Published:2006 Issue:12-13 Volume:38 Page:1747-1750
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Maekawa Ayaka,Yamamoto Takeshi,Ishizaki Yasuhiro,Tanaka Risa,Sakamoto Tetsuo,Owari Masanori,Nojima Masashi,Nihei Yoshimasa

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference7 articles.

1. Nano-dimensional analysis for practical materials using the nano-beam SIMS apparatus

2. Improvement on the Shave-off Depth Resolution in a Submicron SIMS Analysis.

3. Quantitative analysis by submicron secondary ion mass spectrometry

4. Application of focused ion beam lift-out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Molecular Dynamics Simulations for Shave-Off Profiling;e-Journal of Surface Science and Nanotechnology;2012

2. Study on Sputtering Mechanism of Shave-off Profiling;e-Journal of Surface Science and Nanotechnology;2011

3. Failure analysis of fine Cu patterning by shave-off profiling;Surface and Interface Analysis;2010-05-11

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP