Fabrication of periodic arrays of silicide nanopillars by using self-assembled polystyrene nanosphere template and oblique deposition technique-Reference-Cited by-同舟云学术

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Fabrication of periodic arrays of silicide nanopillars by using self-assembled polystyrene nanosphere template and oblique deposition technique

Published:2013-11-25 Issue:12 Volume:10 Page:1866-1869
ISSN:1862-6351
Container-title:physica status solidi (c)
language:en
Short-container-title:Phys. Status Solidi C

Author:

Suzuki Motofumi,Kaneko Yasuyuki,Nakajima Kaoru,Kimura Kenji

Funder

Advanced Low Carbon Technology Research and Development Program (ALCA), JST and The Sumitomo Foundation

Publisher

Wiley

Subject

Condensed Matter Physics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssc.201300344/fullpdf

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanobowl array fabrication based on nanoimprint lithography;Optik;2016-01

2. Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene;Microelectronic Engineering;2016-01

3. Hollow Nanospheres Array Fabrication via Nano-Conglutination Technology;Journal of Nanoscience and Nanotechnology;2015-09-01

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