Limitations of Cl2/O2-based ICP-RIE of deep holes for planar photonic crystals in InP
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Published:2011-11-07
Issue:2
Volume:9
Page:239-242
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ISSN:1862-6351
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Container-title:physica status solidi (c)
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language:en
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Short-container-title:Phys. Status Solidi C
Author:
Kaspar Peter,Fougner Christopher,Kappeler Roman,Jäckel Heinz
Subject
Condensed Matter Physics