1. State Key Laboratory of Transducer Technology Institute of Electronics, Chinese Academy of Sciences Beijing People's Republic of China
2. University of Chinese Academy of Sciences Beijing People's Republic of China
3. School of Electronic Engineering, Beijing University of Posts and Telecommunications Beijing People's Republic of China
4. Department of Mechanical Engineering University of Colorado Boulder Boulder Colorado
5. CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Modern Mechanics University of Science and Technology of China Hefei People's Republic of China
6. School of Information and Electronics, Beijing Institute of Technology Beijing People's Republic of China