Fabrication and evaluation of suspended Micro‐heater using TiN-Reference-Cited by-同舟云学术

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Fabrication and evaluation of suspended Micro‐heater using TiN

Published:2020-12-11 Issue:2 Volume:214 Page:
ISSN:0424-7760
Container-title:Electrical Engineering in Japan
language:en
Short-container-title:Electr Eng Jpn

Author:

Ito Hiroshi¹,Kawamata Yoshio¹,Nikkuni Hiroyuki¹

Affiliation:

1. National Institute of Technology, Tokyo College Tokyo Japan

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Energy Engineering and Power Technology

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/eej.23308

Reference12 articles.

1. An Integrated Gas Sensor Fabricated on a Silicon Substrate

2. Analysis of Heat Transfer in Micro‐bridge Heater;Wado H;Denso technical review,2000

3. Microhotplates with TiN heaters

4. Fabrication of TiN Thin Film Prepared by Reactive Sputtering used for Micro Heaters;Takaoka T;Proc IEICE Society Conference,2016

5. Fabrication and evaluation of TiN micro‐heater for MEMS gas sensor;Ito H;The 36th Sensor Symposium on Sensors, Micromachines, and Applied Systems,2017

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study on Electrical and Mechanical Properties of Double-End Supported Elastic Substrate Prepared by Wet Etching Process;Micromachines;2024-07-20

2. Localized suspended micro-heater structure using dry etching for sensing and actuation application;Journal of Manufacturing Processes;2022-11

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