1. Key Laboratory of Microsystems and Microstructures Manufacturing (Harbin Institute of Technology) Ministry of Education Harbin 150001 China
2. Research Institute of Petroleum Exploration & Development PetroChina Company Limited Beijing 100083 China
3. College of Shipbuilding Engineering Harbin Engineering University Harbin 150001 China
4. Chongqing Research Institute of Harbin Institute of Technology Chongqing 401151 China