1. Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of Shandong Institute for Advanced Interdisciplinary Research (iAIR) University of Jinan Jinan 250022 China
2. Institute for Materials Science and Max Bergmann Center of Biomaterials Technische Universität Dresden 01069 Dresden Germany
3. Center for Advancing Electronics Dresden Technische Universität Dresden 01069 Dresden Germany
4. High‐Frequency High‐Voltage Device and Integrated Circuits R&D Center Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China
5. Key Laboratory of Microelectronic Devices and Integrated Technology Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China
6. State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China
7. Key Laboratory of Modern Power System Simulation and Control and Renewable Energy Technology (Ministry of Education) Northeast Electric Power University Jilin 132012 China
8. School of Electrical Engineering Northeast Electric Power University Jilin 132012 China
9. State Key Laboratory of Crystal Materials Center of Bio and Micro/Nano Functional Materials Shandong University 27 Shandanan Road Jinan 250100 China
10. Dresden Center for Computational Materials Science Technische Universität Dresden 01062 Dresden Germany
11. Dresden Center for Intelligent Materials (GCL DCIM) Technische Universität Dresden 01062 Dresden Germany