Electrodynamic Force, Casimir Effect, and Stiction Mitigation in Silicon Carbide Nanoelectromechanical Switches-Reference-Cited by-同舟云学术

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Electrodynamic Force, Casimir Effect, and Stiction Mitigation in Silicon Carbide Nanoelectromechanical Switches

Published:2020-11-25 Issue:51 Volume:16 Page:2005594
ISSN:1613-6810
Container-title:Small
language:en
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Author:

Yang Rui¹²^ORCID,Qian Jiang¹,Feng Philip X.‐L.¹³^ORCID

Affiliation:

1. Department of Electrical Engineering and Computer Science Case School of Engineering Case Western Reserve University Cleveland OH 44106 USA

2. University of Michigan–Shanghai Jiao Tong University Joint Institute Shanghai Jiao Tong University Shanghai 200240 China

3. Department of Electrical and Computer Engineering Herbert Wertheim College of Engineering University of Florida Gainesville FL 32611 USA

Funder

National Science Foundation

Defense Advanced Research Projects Agency

Defense Threat Reduction Agency

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/smll.202005594

Reference51 articles.

1. Mechanical Computing Redux: Relays for Integrated Circuit Applications

2. Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers

3. Integration of Nanoelectromechanical Relays With Silicon nMOS

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