1. State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information Technology CAS Center for Excellence in Superconducting Electronics Chinese Academy of Sciences Shanghai 200050 P. R. China
2. College of Materials Science and Opto‐Electronic Technology University of Chinese Academy of Sciences Beijing 100049 P. R. China
3. Department of Microelectronic Science and Engineering School of Physical Science and Technology Ningbo University Ningbo 315211 P. R. China