1. Institute of Science and Technology for New Energy Xi'an Technological University Xi'an 710021 China
2. Interdisciplinary Center for Quantum Information State Key Laboratory of Silicon Materials and Zhejiang Province Key Laboratory of Quantum Technology and Device Department of Physics Zhejiang University Hangzhou 310058 China
3. State Key Laboratory of Chemical Engineering, Institute of Pharmaceutical Engineering, College of Chemical and Biological Engineering Zhejiang University Hangzhou 310027 China
4. ZJU‐Hangzhou Global Scientific and Technological Innovation Center Hangzhou 311215 China
5. State Key Laboratory of Silicon Materials and School of Materials Science and Engineering Zhejiang University Hangzhou 310027 China