Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors-Reference-Cited by-同舟云学术

Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors

Published:2022-09-30 Issue:48 Volume:18 Page:2204078
ISSN:1613-6810
Container-title:Small
language:en
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Author:

Kim Taejung¹^ORCID,Cho Wootaek¹,Kim Beomsang¹^ORCID,Yeom Junyeong²^ORCID,Kwon Yeong Min³^ORCID,Baik Jeong Min⁴^ORCID,Kim Jae Joon²^ORCID,Shin Heungjoo¹^ORCID

Affiliation:

1. Department of Mechanical Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Republic of Korea

2. Department of Electrical Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Republic of Korea

3. Department of Materials Science and Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Republic of Korea

4. School of Advanced Materials Science and Engineering Sungkyunkwan University (SKKU) Suwon 16419 Republic of Korea

Funder

National Research Foundation of Korea

Korea Evaluation Institute of Industrial Technology

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/smll.202204078

Reference63 articles.

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4. Perfectly Aligned, Air‐Suspended Nanowire Array Heater and Its Application in an Always‐On Gas Sensor

5. In Situ Localized Growth of Ordered Metal Oxide Hollow Sphere Array on Microheater Platform for Sensitive, Ultra-Fast Gas Sensing

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