1. Zhejiang Province key Laboratory of Quantum Technology and Device Department of Physics Zhejiang University Hangzhou 310027 China
2. State Key Laboratory of Chemical Engineering Institute of Pharmaceutical Engineering College of Chemical and Biological Engineering Zhejiang University Hangzhou 310027 China
3. ZJU‐Hangzhou Global Scientific and Technological Innovation Center Hangzhou 311215 China
4. Interdisciplinary Center for Quantum Information State Key Laboratory of Silicon Materials Zhejiang University Hangzhou 310027 China