High‐Performance 3D Stacked Micro All‐Solid‐State Thin‐Film Lithium‐Ion Batteries Based on the Stress‐Compensation Effect

Abstract

AbstractA novel all‐solid‐state thin‐film lithium‐ion battery (LIB) is presented to address the trade‐off issue between the specific capacity and stabilities in a conventional LIB. Different from the conventional one, this LIB device consists of two same LIB components located at the front and back surfaces of the substrate, respectively. These two LIB components form parallel connection by using the conductive through vias distributed in the substrate. Compared with the conventional one, this LIB device doubles the areal specific capacity. More importantly, due to the stress‐compensation effect, this device effectively suppresses the stress induced by its volume changes resulting from the lithiation/delithiation processes and thermal expansion. Consequently, this device shows good cycling and thermal stabilities even when working at an industrial‐grade high temperature of 125 °C. To further improve the specific capacity without sacrificing the stabilities, a 3D stacked LIB is successfully realized by using this LIB device as the cell, in which each cell is parallelly connected by using the above‐mentioned conductive through vias. This 3D stacked LIB is experimentally demonstrated to obtain high specific capacity (79.9 µAh cm−2) and good stabilities (69.3% of retained capacity after 100 cycles at 125 °C) simultaneously.