1. Guangdong Institute of Semiconductor Industrial Technology GuangdongGuangdong Academy of Sciences Guangzhou 510650 China
2. Department of Chemistry and Biological EngineeringGuilin University of Technology Guilin 541004 China
3. Siyuan LaboratoryGuangdong Provincial Engineering Technology Research Center of Vacuum Coating Technologies and New MaterialsDepartment of PhysicsJinan University Guangzhou 510632 China