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2. and in VLSI Electronics Microstructure Science 12, ed. by and Chapt. 8, pp. 385-442. Academic Press, New York (1985).
3. Solid State Electronic Devices, p. 363. Prentice Hall, Englewood Cliffs, NJ (1990).
4. (a) and Proceedings of the Microcontamination Meeting, San Jose, CA (1991).
5. Correlation of surface morphology and chemical state of Si surfaces to electrical properties