1. Division of Advanced Manufacturing, Graduate School at Shenzhen; Tsinghua University; Shenzhen 518055 China
2. State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument; Tsinghua University; Beijing 100084 China
3. Guangdong Province Engineering Research Center for Urban Water Recycling and Environmental Safety; Graduate School at Shenzhen, Tsinghua University; Shenzhen 518055 China