1. ITMO University Kronverksky prospect 49 St. Petersburg 197101 Russia
2. Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (INME RAS) Nagatinskaya Street, House 16A, Building 11 Moscow 119991 Russia
3. Electrotechnical University “LETI” (ETU) 5 Prof. Popova Street Saint Petersburg 197376 Russia
4. LLC COMSOL Bolshaya Sadovaya St. 10 Moscow 123001 Russia
5. Czech Academy of Sciences Institute of Scientific Instruments Královopolská 147 Brno 612 64 Czech Republic