1. Laboratory for MEMS Applications; IMTEK Department of Microsystems Engineering; University of Freiburg; Georges-Koehler-Allee 103 79110 Freiburg Germany
2. Hahn-Schickard; Georges-Koehler-Allee 103 79110 Freiburg Germany
3. FIT; University of Freiburg; Georges-Koehler-Allee 105 79110 Freiburg Germany