Cryoaerosol Cleaning of Particles from Surfaces-Reference-Cited by-同舟云学术

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Cryoaerosol Cleaning of Particles from Surfaces

Published:2015-02-06 Issue: Volume: Page:453-476
ISSN:
Container-title:Particle Adhesion and Removal
language:
Short-container-title:

Author:

Banerjee Souvik

Publisher

John Wiley & Sons, Inc.

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/9781118831571.ch12/fullpdf

Reference28 articles.

1. Semiconductor Industry Association International Technology Roadmap for Semiconductors (ITRS) 2013

2. Cryogenic Aerosols and Supercritical Fluid Cleaning

3. Cleaning surfaces with dry ice;Hoenig;Compressed Air Magazine,1986

4. High velocity carbon dioxide snow for cleaning vacuum system surface;Layden;J. Vac. Sci. Technol,1990

5. Dry surface cleaning using CO2 snow;Sherman;J. Vac. Sci. Technol,1991

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laser-induced Spray Jet Cleaning Using Isopropyl Alcohol for Nanoparticle Removal from Solid Surfaces;Particulate Science and Technology;2015-07-06

2. Supercritical Carbon Dioxide Cleaning: Relevance to Particle Removal;Particle Adhesion and Removal;2015-02-06

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