Defect topography on GaAs wafers by microwave‐detected photo‐induced current transient spectroscopy
Author:
Affiliation:
1. Technical University Bergakademie Freiberg, Silbermannstr. 1, 09596 Freiberg, Germany
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssc.200306253
Reference8 articles.
1. GaAs wafer mapping by microwave-detected photoconductivity
2. J.‐M.Spaeth J. R.Niklas andR. H.Bartram Multiple Magnetic Resonance Spectroscopy for Structural Analysis of Point Defects in Solids (Springer‐Verlag Heidelberg 1991).
3. P.BloodandJ. W.Orton The Electrical Characterization of Semiconductors: Majority Carrier and Electron States (Academic Press London 1992).
4. Computer controlled microwave transient photoconductivity for the nondestructive characterization of GaAs substrates
5. Dispersive microwave transient spectroscopy of deep levels in semiconductors
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