Micro and nano on insulator
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Published:2008-12
Issue:12
Volume:5
Page:3588-3593
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ISSN:1610-1634
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Container-title:physica status solidi (c)
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language:en
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Short-container-title:phys. stat. sol. (c)
Author:
Cristoloveanu Sorin
Subject
Condensed Matter Physics
Reference81 articles.
1. Device scaling limits of Si MOSFETs and their application dependencies
2. Frontiers of silicon-on-insulator
3. J.-P. Colinge, Silicon-On-Insulator Technology: Materials to VLSI, 3rd ed. (Kluwer, Boston, 2004).
4. S. Cristoloveanu and S.S. Li, Characterization of Silicon-On-Insulator Materials and Devices (Kluwer, Boston, 1995).
5. S. Cristoloveanu and G.K. Celler, in: Handbook of Semiconductor Manufacturing Technology, edited by R. Doering and Y. Nishi (CRC Press, 2007).
Cited by
1 articles.
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