Hydride vapor phase epitaxial growth of thick GaN layers with improved surface flatness
Author:
Affiliation:
1. Optoelectronics Dept., Ulm University, 89081 Ulm, Germany
2. ITRI, Hsinchu, Taiwan
3. AIXTRON AG, Kackertstrasse 15‐17, 52072 Aachen, Germany
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssc.200461459
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Growth of Bulk GaN from Gas Phase;Crystal Research and Technology;2018-03-12
2. Effect of carrier gas in hydride vapor phase epitaxy on optical and structural properties of GaN;physica status solidi (b);2015-03-20
3. Nucleation of GaN on sapphire substrates at intermediate temperatures by Hydride Vapor Phase Epitaxy;Crystal Research and Technology;2012-01-31
4. HVPE growth of high quality GaN layers;physica status solidi (c);2006-06
5. Method for HVPE growth of thick crack-free GaN layers;Journal of Crystal Growth;2006-05
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