The influence of N2 flow rate and substrate temperature on Ti1-xAlxN thin films
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference14 articles.
1. A comparative study on the structure and properties of nanolayered TiN/NbN and TiAlN/TiN multilayer coatings prepared by reactive direct current magnetron sputtering
2. A Raman-scattering study on the interface structure of nanolayered TiAlN∕TiN and TiN∕NbN multilayer thin films grown by reactive dc magnetron sputtering
3. Effect of aluminum concentration on friction and wear properties of titanium aluminum nitride films
4. Quantification of properties modification and cutting performance of (Ti1−xAlx)N coatings at elevated temperatures
5. Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering
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1. Tribological properties of the Ti–Al–N thin films with different components fabricated by double-targeted co-sputtering;Applied Surface Science;2010-04
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