1. Department of Inorganic Chemistry II; Ruhr-University-Bochum; Universitätsstr. 150 44780 Bochum Germany
2. Electron Microscopy for Materials Science (EMAT); University of Antwerp; Groenenborgerlaan 171 B-2020 Antwerp Belgium
3. Chair for MEMS Materials and Materials Research Department; Ruhr-University-Bochum; Universitätsstr. 150 44780 Bochum Germany