Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications
Author:
Affiliation:
1. Department of Chemical Engineering Stanford University 443 Via Ortega Stanford CA 94305 USA
2. Department of Chemistry Stanford University 443 Via Ortega Stanford CA 94305 USA
3. Applied Materials 974 East Avenue, M/S 81280 Sunnyvale CA 94085 USA
Funder
National Science Foundation
U.S. Department of Energy
Publisher
Wiley
Subject
Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/adfm.201904129
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5. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
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