1. Department of Microtechnology and Nanoscience (MC2); Chalmers University of Technology; Kemivägen 9 SE 412, 96 Göteborg Sweden
2. SHT Smart High-Tech AB; Aschebergsgatan 46 SE-411, 33 Göteborg Sweden
3. SMIT Center and School of Mechatronics and Mechanical Engineering; Key Laboratory of New Displays and System Integration; Shanghai University No 149; Yan Chang Road Shanghai 200072 China