Self-Limited Reaction-Diffusion in Nanostructured Substrates: Surface Coverage Dynamics and Analytic Approximations to ALD Saturation Times
Author:
Publisher
Wiley
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/cvde.201106938/fullpdf
Reference28 articles.
1. ZnO Nanotube Based Dye-Sensitized Solar Cells
2. Palladium Catalysts Synthesized by Atomic Layer Deposition for Methanol Decomposition
3. High dielectric constant gate oxides for metal oxide Si transistors
4. Multifunctional 3D nanoarchitectures for energy storage and conversion
5. Atomic layer deposition (ALD): from precursors to thin film structures
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