1. Division of Micro and Nanosystems KTH Royal Institute of Technology Stockholm 100 44 Sweden
2. CENTERA Laboratories Institute of High-Pressure Physics PAS Warsaw 01-142 Poland
3. Institute of Optoelectronics Military University of Technology Warsaw 00-908 Poland
4. THz Biomedicine Laboratory ITMO University Saint Petersburg 197101 Russia
5. Saratov National Research State University Saratov 410012 Russia