Wearable and Multiplexed Biosensors based on Oxide Field‐Effect Transistors

Abstract

AbstractWearable sensors designed for continuous, non‐invasive monitoring of physicochemical signals are important for portable healthcare. Oxide field‐effect transistor (FET)‐type biosensors provide high sensitivity and scalability. However, they face challenges in mechanical flexibility, multiplexed sensing of different modules, and the absence of integrated on‐site signal processing and wireless transmission functionalities for wearable sensing. In this work, a fully integrated wearable oxide FET‐based biosensor array is developed to facilitate the multiplexed and simultaneous measurement of ion concentrations (H+, Na+, K+) and temperature. The FET‐sensor array is achieved by utilizing a solution‐processed ultrathin (≈6 nm thick) In2O3 active channel layer, exhibiting high compatibility with standard semiconductor technology, good mechanical flexibility, high uniformity, and low operational voltage of 0.005 V. This work provides an effective method to enable oxide FET‐based biosensors for the fusion of multiplexed physicochemical information and wearable health monitoring applications.