Additive Manufacturing in Atomic Layer Processing Mode-Reference-Cited by-同舟云学术

Additive Manufacturing in Atomic Layer Processing Mode

Published:2022-03-11 Issue:5 Volume:6 Page:2101546
ISSN:2366-9608
Container-title:Small Methods
language:en
Short-container-title:Small Methods

Author:

Kundrata Ivan¹²³,Barr Maïssa K. S.²,Tymek Sarah²,Döhler Dirk²,Hudec Boris³,Brüner Philipp⁴,Vanko Gabriel³,Precner Marian³,Yokosawa Tadahiro⁵,Spiecker Erdmann⁵,Plakhotnyuk Maksym¹,Fröhlich Karol³⁶,Bachmann Julien¹²^ORCID

Affiliation:

1. ATLANT 3D Nanosystems Kongens Lyngby 2800 Denmark

2. Friedrich‐Alexander‐Universität Erlangen‐Nürnberg Chemistry of Thin Film Materials IZNF 91058 Erlangen Germany

3. Institute of Electrical Engineering Slovak Academy of Sciences Bratislava 841 04 Slovakia

4. IONTOF GmbH 48149 Münster Germany

5. Friedrich‐Alexander University of Erlangen‐Nürnberg Chair of Micro‐ and Nanostructure Research (IMN) and Center for Nanoanalysis and Electron Microscopy (CENEM) IZNF 91058 Erlangen Germany

6. Center for Advanced Materials Application Slovak Academy of Sciences Bratislava 845 11 Slovakia

Publisher

Wiley

Subject

General Materials Science,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/smtd.202101546

Reference45 articles.

1. Decal Transfer Microlithography: A New Soft-Lithographic Patterning Method

2. An Introduction to Lithography

3. The rise of 3-D printing: The advantages of additive manufacturing over traditional manufacturing

4. Additive manufacturing (3D printing): A review of materials, methods, applications and challenges

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Two-dimensional materials based memtransistors: Integration strategies, switching mechanisms and advanced characterizations;Nano Energy;2024-09

2. Multi-material 3D nanoprinting for structures to functional micro/nanosystems;International Journal of Extreme Manufacturing;2024-08-06

3. Advance in additive manufacturing of 2D materials at the atomic and close-to-atomic scale;npj 2D Materials and Applications;2024-03-06

4. Subtractive Patterning of Nanoscale Thin Films Using Acid‐Based Electrohydrodynamic‐Jet Printing;Small Methods;2023-12-31

5. Nanofabrication and Demonstration of a Direct‐Write Microevaporator;Small Science;2023-12-22