Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale Patterns
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/adma.200803302/fullpdf
Reference260 articles.
1. Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes
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3. Patternable Block Copolymers
4. Polymer self assembly in semiconductor microelectronics
5. Patterning with block copolymer thin films
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