A review of capacitive MEMS hydrogen sensor using Pd‐based metallic glass with fast response and low power consumption

Author:

Yamazaki Hiroaki1,Hayashi Yumi1,Masunishi Kei2,Ono Daiki1,Ikehashi Tamio1

Affiliation:

1. Corporate Research & Development Center Toshiba Corporation

2. Manufacturing Engineering Center Toshiba Corporation

Funder

National Institute for Materials Science

Ministry of Education, Culture, Sports, Science and Technology

Publisher

Wiley

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing

Reference19 articles.

1. New Energy and Industrial Technology Development Organization.NEDO white paper on hydrogen energy;2014(in Japanese).

2. Hydrogen sensors – A review

3. Hydrogen sensing ability of Pd-based amorphous alloys

4. Highly aligned suspended nanowire array for self‐heating type gas sensors;Choi K;Digest Tech,2017

5. Low power hydrogen sensors using electrodeposited PdNi–Si Schottky diodes

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