Thickness and coverage determination of multilayer with an island-like overlayer by hard X-ray photoelectron spectroscopy at multiple photon energies-Reference-Cited by-同舟云学术

Thickness and coverage determination of multilayer with an island-like overlayer by hard X-ray photoelectron spectroscopy at multiple photon energies

Author:

Isomura N.¹,Kataoka K.¹,Horibuchi K.¹,Dohmae K.¹,Oji H.²,Cui Y.-T.²³,Son J.-Y.²,Kitazumi K.¹,Takahashi N.¹,Kimoto Y.¹

Affiliation:

1. Toyota Central R&D Labs., Inc.; 41-1 Yokomichi Nagakute Aichi 480-1192 Japan

2. Japan Synchrotron Radiation Research Institute (JASRI); 1-1-1 Kouto Sayo Hyogo 679-5198 Japan

3. Synchrotron Radiation Research Organization; The University of Tokyo; 7-3-1 Hongo Bunkyo-ku Tokyo 113-8656 Japan

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

Reference29 articles.

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

5. Recent applications of hard x-ray photoelectron spectroscopy;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2016-05