Flexible and Epitaxial Metal Oxide Thin Film Growth by Photoreaction Processing for Electrical and Optical Applications
Author:
Affiliation:
1. Advanced Coating Technology Research CenterNational Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2 1-1-1 Higashi Tsukuba Ibaraki 305-8565 Japan
Publisher
Wiley
Subject
General Chemistry,Catalysis,Organic Chemistry
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/chem.201905879
Reference79 articles.
1. Low-Temperature Processing of Ferroelectric Thin Films Compatible with Silicon Integrated Circuit Technology
2. ArF excimer laser induced CVD of aluminum oxide films
3. KrF laser CVD of titanium oxide from titanium tetraisopropoxide
4. Crystal Structure of Zirconium Oxide Deposited as Thin Films from Zr-acetylacetonate and Zr-ter-butoxide by Laser Chemical Vapor Deposition Technique
5. Selective deposition of anatase and rutile films by KrF laser chemical vapor deposition from titanium isopropoxide
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Local piezoelectric properties of Bi3TaTiO9 thin films: The role of grain crystallinity;Materials Science and Engineering: B;2023-11
2. Rapid laser-induced low temperature crystallization of thermochromic VO2 sol-gel thin films;Applied Surface Science;2023-09
3. Recent progress in flexible pressure sensors based on multiple microstructures: from design to application;Nanoscale;2023
4. Flexible transparent electromagnetic interference shielding films with silver mesh fabricated using electric-field-driven microscale 3D printing;Optics & Laser Technology;2022-04
5. Flexible Ceramic Film Sensors for Free-Form Devices;Sensors;2022-03-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3