Development of an Automatic System for Measuring Particle Charge and Size distributions in a clean room

Author:

Adachi Motoaki,Liu Benjamin Y. H.,Pui David Y. H.

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Reference9 articles.

1. Particle Contamination and Microelectronics Manufacturing; an Introduction;Cooper;Aerosol Sci. Technol.,1986

2. Aerosol Wall Losses is Electrically Charged Chamber;McMurry;Aerosol Sci. Technol.,1985

3. B. Y. H. Liu B. Fardi K. Ahn Deposition of Charged and Uncharged Aerosol Particles on Semiconductor Wafers. Proceedings 1987

4. Measurement of Aerosol Concentration as a Function of Size and Charge;Biermann;Aerosol Sci. Technol.,1984

5. R. P. Donovan B. R. Locke D. S. Ensor C. M. Osburn The Case for Incorporating Condensation Nuclei 1984 38 44

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