Author:
Adachi Motoaki,Liu Benjamin Y. H.,Pui David Y. H.
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference9 articles.
1. Particle Contamination and Microelectronics Manufacturing; an Introduction;Cooper;Aerosol Sci. Technol.,1986
2. Aerosol Wall Losses is Electrically Charged Chamber;McMurry;Aerosol Sci. Technol.,1985
3. B. Y. H. Liu B. Fardi K. Ahn Deposition of Charged and Uncharged Aerosol Particles on Semiconductor Wafers. Proceedings 1987
4. Measurement of Aerosol Concentration as a Function of Size and Charge;Biermann;Aerosol Sci. Technol.,1984
5. R. P. Donovan B. R. Locke D. S. Ensor C. M. Osburn The Case for Incorporating Condensation Nuclei 1984 38 44
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献