Atmospheric pressure argon plasma jets I – Measurements of spatial distribution for visible emission spectrum and vacuum ultraviolet

Author:

Suzuki Susumu1,Teranishi Kenji2,Itoh Haruo1

Affiliation:

1. Chubu Institute of Technology, Tsudanuma Narashino Japan

2. Tokushima University Minami‐josanjima Tokushima Japan

Abstract

AbstractThis paper describes the observed position dependent emission spectrum and vacuum ultraviolet (VUV) to clarify the optical structure of argon atmospheric pressure plasma jets (APJs). Visible emission spectra of argon, nitrogen, and OH molecules were measured as a function of position from the nozzle of plasma jet generator to gas flow direction. From the results, we realized that a certain electric field is required for producing high energy excited atoms of argon in the jet from the high voltage electrode in the device to the ground positioned at downstream side. Moreover, VUV was detected along the plasma jet through the downstream direction. Thus, we could picture that the light pattern of plasma jet of which intensity weaken depend to the distance from the nozzle is sustained by the above two factors with the present steady state experiments.

Publisher

Wiley

Reference34 articles.

1. TakahashiK SatohK ItohH.Optical emission spectroscopy of an atmospheric argon plasma jet. In:Proceedings of 2013 Annual Conference of Fundamentals and Materials Society 13‐E‐a1‐3 IEE Japan;2013(in Japanese).

2. KunikataY AkadaS MizutaK TeranishiK ShimomuraN.Influence of nozzle shape on plasma length for surrounding gas‐fed plasma jet device. Paper presented at:Shikoku‐Section Joint Convention Record of the Institutes of Electrical and Related Engineers 2–12;2016;Tokushima Japan(in Japanese).

3. SuzukiS TeranishiK ShimomuraN ItohH.Spectroscopic measurement of argon atmospheric pressure plasma jet. Paper presented at:XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP‐10) PO16PM‐040;2019;Sapporo Japan.

4. Etching materials with an atmospheric-pressure plasma jet

5. Investigation of an atmospheric pressure radio-frequency capacitive plasma jet

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