P‐104: Corrugated Silicon Nitride Masks with Enhanced Mechanical Strength for Patterning RGB‐Stripe OLED Microdisplays-Reference-Cited by-同舟云学术

P‐104: Corrugated Silicon Nitride Masks with Enhanced Mechanical Strength for Patterning RGB‐Stripe OLED Microdisplays

Published:2024-06 Issue:1 Volume:55 Page:1784-1785
ISSN:0097-966X
Container-title:SID Symposium Digest of Technical Papers
language:en
Short-container-title:Symp Digest of Tech Papers

Author:

Dong Shou-Cheng¹²³,Yang Jiye¹,Tam Bryan Siu Ting¹,Tang Ching W.⁴

Affiliation:

1. State Key Laboratory of Advanced Displays and Optoelectronics Technologies, Department of Electronic and Computer Engineering The Hong Kong University of Science and Technology Hong Kong

2. Institute for Advanced Study The Hong Kong University of Science and Technology Hong Kong

3. WISPO Advanced Materials (Suzhou) Co., Ltd. Suzhou China

4. Department of Chemical Engineering University of Rochester Rochester New York USA

Abstract

Corrugated silicon nitride masks (SiNMs) with improved mechanical strength are developed for patterning OLED microdisplays. The corrugations in the nitride membrane significantly increase the rigidity of the mask and reduce sagging, enabling 3000‐ppi slot apertures for patterning RGB‐stripe pixel layouts that are normally not achievable by fine metal masks.

Publisher

Wiley

Reference4 articles.

1. 17‐5: Enhancement of Luminance Efficiency of 3,000ppi OLED Micro‐display using RGB Direct Patterning

2. 61‐2: 2‐inch, 2,000‐ppi Silicon Nitride Mask for Patterning Ultra‐High‐Resolution OLED Displays

3. 3-inch, 3000- ppi Silicon Nitride Masks for Direct Patterning of OLED Microdisplays;Dong SC;International Conference on Display Technology,2022

4. 85‐1: Ultrahigh‐Resolution Corrugated Silicon Nitride Masks for Direct Patterning of OLED Microdisplays