Electrical Measurements and Optical Emission Spectroscopy of Silicon–Carbon Alloys Grown by PACVD: Correlation with Film Microstructure
Author:
Publisher
Wiley
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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