Author:
Pilvi Tero,Puukilainen Esa,Munnik Frans,Leskelä Markku,Ritala Mikko
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Reference46 articles.
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2. YF3:Nd3+, Pr3+, Gd3+ wide band gap crystals as optical materials for 157-nm photolithography
3. Crystallographic Data 154-156: Yttruim Trifluoride,YF3,Orthorhombic Form; Samarium Trifluoride,SMF3 Orthorhombic Form; Ytterbium Trifluoride,YbF3,Orthorhombic Form
4. Fluoride compounds for IR coatings
5. Characterization of inhomogeneous transparent thin films on transparent substrates by spectroscopic ellipsometry: refractive indices n(λ) of some fluoride coating materials
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